A SIMPLE KEY FOR SIC WAFERS UNVEILED

PiN diodes fabricated with a proton-implanted wafer clearly show latest–voltage properties just like Individuals of PiN diodes without having proton implantation. In distinction, the growth of 1SSFs is successfully suppressed in PiN diodes with proton implantation. Therefore, proton implantation into 4H-SiC epitaxial wafers is a successful system